半导瓷湿敏元件的研究  

Research on the Humidity Sensor of Semiconductor Ceramics

作　　者：王毅[1] 王连星[1] 游恩溥[1] 

机构地区：[1]西北轻工业学院

出　　处：《陶瓷》1992年第5期1-4,共4页Ceramics

摘　　要：本文研究了ZnO-Cr_2O_3-LiCl系统的湿敏特性,结果证实该新型敏感元件具有良好的时间稳定性和感湿特性;微观结构分析表明,其结构对该湿敏元件的性能具有较大的影响。The humidity sensitivity of the ZnO-Cr_2O_3-LiCl system has been studied, it was found that this new sensor had a good time stability and humidity sensitivity.The microstructure of the sensor has been analysed,and the properties of the sensor were influenced greatly by its microstructure.

关 键 词：半导体陶瓷 湿敏元件 微观结构 

分 类 号：TN379[电子电信—物理电子学]