高输出功率锥形波导太赫兹量子级联激光器  

High output power tapered terahertz quantum cascade laser

作　　者：王涛[1] 刘俊岐[1] 刘峰奇[1] 

机构地区：[1]中国科学院半导体研究所半导体材料科学重点实验室,北京100083

出　　处：《太赫兹科学与电子信息学报》2015年第3期361-364,共4页Journal of Terahertz Science and Electronic Information Technology

基　　金：国家"973计划"资助项目(2014CB339803;2013CB632801);中国工程物理研究院太赫兹科学技术基金资助项目(CAEPTHZ201303)

摘　　要：制作了基于锥形波导结构的高输出功率的太赫兹(THz)量子级联激光器。激光器采用单面金属波导结构,并采用锥形波导形状提高光输出功率,且保证了良好的光斑远场发散角。激光器水平方向远场光斑发散角为18.4°,器件输出中心波长为93μm(3.23 THz),器件最高输出功率达到了185 m W,最高工作温度为95 K。80 K时,器件的最高脉冲输出功率能达到65 m W。基于如此高的输出功率,制作了液氮杜瓦封装的小型便携式太赫兹激光源。High output power terahertz(THz) quantum cascade laser based on tapered waveguide profile is fabricated. Semi-insulating surface-plasma waveguide structure and tapered profile are adopted to enable high output power and excellent far-field lobe profile. The Full Width at Half Maximum(FWHM) of the laser beam in the horizontal direction is 18.4°. The emission wavelength is centered at 93 μm(3.23 THz), the highest output power is 185 m W and the highest operation temperature is 95 K. The output power at 80 K is 65 m W. Based on the high output property, portable terahertz laser source is packaged by liquid nitrogen dewar.

关 键 词：量子级联激光器 太赫兹 高功率 

分 类 号：TN248[电子电信—物理电子学]