基于模拟退火的软X射线多层膜反射镜设计  

Design of Soft X-ray Multi-layer Mirrors Based on Simulated Annealing

作　　者：胡家升[1] 宋利民[2] 

机构地区：[1]大连理工大学电子与信息工程学院,辽宁大连116024 [2]大连海事大学信息工程学院,辽宁大连116024

出　　处：《光电子．激光》2004年第1期37-40,共4页Journal of Optoelectronics·Laser

摘　　要：基于模拟退火(SA)算法,对软x射线短波段中的几个波长的多层膜反射镜进行了优化设计,获得了它们的光学参数,包括多层膜反射镜的最佳周期厚度、最佳厚度比和峰值反射率,进而制作多层膜反射镜并在北京同步辐射装置上进行了反射率的实际测量。测量结果表明,该反射镜具有实用的反射率。这表明,SA方法适用于软x射线短波段多层膜反射镜的优化设计。The simulated annealing(SA) arithmetic was used in the optimized designing multilayer film mirror for several wavelength in soft X-ray region and the optimized optical parameters was gained, including the optimized period thickness, thickness ratio and peak reflectance. According to the design results, the mirrors were fabricated and were measured in the device of Beijing synchronization radiation. It shows that the simulated annealing method is indeed practical for the design of multi-layer mirrors in soft x-ray region.

关 键 词：模拟退火 SA 反射率 多层膜反射镜 软X射线 优化设计 

分 类 号：TH74[机械工程—光学工程]