各向异性材料光学常数全自动椭偏测仪  

Automatic Ellipsometry Measurement Instrument for Anisotropic Materials

作　　者：李洋[1] 唐宁[1] 姚熹[2] 

机构地区：[1]西北电力试验研究院,陕西西安710054 [2]西安交通大学,陕西西安710049

出　　处：《机电工程技术》2004年第1期57-60,共4页Mechanical & Electrical Engineering Technology

摘　　要：本文介绍了一套将光度式旋转检偏器椭偏(RAE)系统同改变环境媒质、改变样品方位角、改变入射角相结合的全部测试过程由计算机控制的椭偏测试系统VMAE。它是通过改变环境媒质、光入射角以及自动改变样品方位角等方法测量多组椭偏参数,得到足够的独立方程,并通过计算机采用三种优化Powell,单纯形,转轴法方法求解多峰值超越方程组以研究光轴垂直、平行于表面的各向异性体、膜材料光学性能。并研制了一套除适用上述方法外还可兼容多波长法、多厚度法等方法的功能全面的模块集成化软件。最后通过比较实验结果与理论值的方法对系统的可靠性进行了验证。A new variable medium and angle ellipsometry (VMAE) system based on computer is described in this paper. A rotating analyzer ellipsometer is used to combine with several working mode such as changing medium, changing incident angle of laser beam,and changing azimuth of sample etc..Using these methods, it is able to get enough equations for calculation of refractive indexes and birefrigence of anisotropic bulk materials and thin films with axis perpendicular or parallel to surface.Using Powell, Rosenbrock, Palmer etc. direct optimization methods, the surmount equation group for calculating the optical constants of anisotropic materials is able to solved by computer. A integrated multifunction window software combinating the advantages of Assemble, C++ and FORTRAN languages is developed, fitting for not only various measurement methods mentioned above, but also other methods such as multi-wavelength, multi-thickness etc.. Experiment results are compared with theoretical values to verify the reliability of this system.

关 键 词：各向异性材料 椭偏测试 集成化软件 光学常数 椭偏测仪 

分 类 号：TH744[机械工程—光学工程]