一种压阻传感器温度误差校正方法  

A Correction Method of Temperature Error of Piezoresistive Sensor

作　　者：贾令剑 常永良 

机构地区：[1]烟台龙源电力技术股份有限公司,山东烟台264001 [2]中海鼎业(烟台)地产有限公司,山东烟台264001

出　　处：《仪表技术》2015年第3期50-51,54,共3页Instrumentation Technology

摘　　要：对影响压阻式传感器性能的诸多因素进行了分析,对于压阻式加速度传感器的结构特性、工作原理进行了介绍。压阻式传感器是一种专用传感器信号处理器,它可以补偿温度误差和非线性误差,使传感器的精度达到0.5‰以内。阐述了压阻式传感器自补偿的原理,并通过公式逐步描述了其补偿的步骤和作用。通过实验结果可以看出,该传感器的非线性误差很小,性能优越,灵敏度较高。The factors influencing the performances of piezoresistive sensor are analyzed in this paper. The structure characteristics of piezoresistive acceleration sensor and working principle are analyzed. Piezoresistive sensor is a kind of special sensor signal processor. It can compensate the temperature error and nonlinear error. The sensor precision is0. 5‰. The self-compensation principleis introduced systematically. Steps and functions of compensation are described step by step through the formula. It can be seen from experimental results that the sensors has small nonlinear error,superior performance and high sensitivity.

关 键 词：压阻式传感器 误差 信号调节电路 校正 加速度 灵敏度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]