不同离子束参数刻蚀蓝宝石纳米微结构及其光学性能  

Sapphire nanostructure and optical property eroded by different ion beam parameters

作　　者：王梦皎 陈智利[1] 

机构地区：[1]西安工业大学光电工程学院,陕西西安710032

出　　处：《应用光学》2014年第4期691-695,共5页Journal of Applied Optics

摘　　要：使用微波回旋共振离子源,研究Ar+离子束在不同角度、不同入射能量下对蓝宝石表面的刻蚀效果及光学性能。结果表明:所用能量800eV,1 000eV及1 200eV时透过率都有很大的提升,由原来的50%提高到70%~80%,在能量为1 000eV时增幅最大,能量为1 200eV时增幅最小;在相同能量、不同角度下刻蚀后蓝宝石粗糙度呈先增大后减小的趋势,而在相同角度、不同能量下粗糙度方面无明显规律。刻蚀后表面形貌测试表明:角度不变,能量为1 000eV时出现点状纳米结构,能量为1 200eV时出现柱状纳米结构;能量不变,角度为10°、50°及80°时出现了规律较明显的点状或条状纳米结构,角度为30°时表面较为光滑。T his dissertation aimed at the research direction of the etching result and optical property of sapphire .The microwave cyclotron resonance ion source was selected as the re-search instrument .The incident angle and incident energy of Ar + ion beam were the parametric variables of the research .T he research indicates that different variables can lead to different re-sults .When the incident energy is limited to the levels of 800 eV ,1 000 eV and 1 200 eV ,the transmittance achieves a big improvement from 50% to around 75% .The biggest and smallest increase of transmittance appear with the incident energy of 1000ev and 1200ev respectively . Besides ,under the circumstances of same incident energy and different incident angles , the roughness of etched sapphire show s the tendency of firstly increasing and then decreasing . However ,under the opposite circumstances the roughness does not show significant regulari-ty .In addition ,the surface morphology test after etching also receives different results .When the incident angle is constant and the incident energy is 1 000 eV ,the point-like nanostructure turns up .Increasing the energy to 1 200 eV ,the columnar nanostructure turns up .After vari-ables are swapped , the incident energy is constant ,the regular point-like nanostructure or strip-like nanostructure show up with the incident angles of 10° ,50° and 80° .When the inci-dent angle is set in 30° ,the surface of sapphire is smooth .

关 键 词：低能离子束刻蚀 透过率 表面粗糙度 纳米结构 

分 类 号：TB383.1[一般工业技术—材料科学与工程]