表面粗糙度数字全息检测  

Surface roughness measurement based on digital holography

作　　者：陈刚[1] 周文静[2] 胡祯[1] 周清[1] 彭克琴 张伟[2] 

机构地区：[1]上海市质量监督检验技术研究院,上海200072 [2]上海大学精密机械工程系,上海200072

出　　处：《应用光学》2014年第6期1040-1047,共8页Journal of Applied Optics

基　　金：国家自然科学基金资助项目(61107004);国家质检总局科技计划项目(2013Qk143)

摘　　要：鉴于数字全息表面粗糙度测量是对被记录的数字全息图进行数值重建获得相应的相位值,将其映射为表面轮廓值后来计算表面粗糙度参数的,分别以标准分辨率板和高度标定板为检测样本,对构建的数字全息测量系统进行了重建误差及重复性测试,包括横向尺寸误差及高度误差,横向尺寸重建误差及重复误差分别为1.11%和0.61%,高度重建误差及重复误差分别为11%和1.8%。以宽带介质膜平面反射镜为样本,测得其3段评定长度(包含15个取样长度)的表面粗糙度平均值分别为0.010 37μm、0.010 33μm和0.009 67μm。Surface roughness measurement based on digital holography was carried out . The tested surface roughness parameters were calculated from the surface profile which was mapped from the reconstructed phase distribution of digital hologram .Firstly ,the standard calibration plate and high‐resolution panel w ere taken as the tested samples to reconstruct errors and test the repeatability of the digital holography measurement system ,involving the lateral size error and the height error . The reconstruction error and repeatability error for lateral size were 1 .11% ,0 .61% ,respectively .And the errors for height were 11% ,1 .8% ,respectively .Then an ordinary coated reflector was taken as a sample , and its surface roughness values along 3 segments of evaluation length were 0 .010 37 μm ,0 .010 33 μm ,and 0 .009 67 μm ,respectively (15 sampling lengths) .

关 键 词：无损检测 数字全息 表面粗糙度 

分 类 号：TP391.41[自动化与计算机技术—计算机应用技术] O438.1[自动化与计算机技术—计算机科学与技术]