卡塞格林系统光学装调技术研究  

Research on optical alignment technology for Cassegrain system

作　　者：张向明[1] 姜峰[1] 孔龙阳 李玉喜[1] 刘奕辰[1] 张锦亮[1] 赵红军[1] 王智超[1] 钟丽萍[1] 

机构地区：[1]西安应用光学研究所,陕西西安710065

出　　处：《应用光学》2015年第4期526-530,共5页Journal of Applied Optics

摘　　要：介绍卡塞格林系统非球面主镜使用三坐标测量仪进行定心装调的方案。系统的主镜口径为300mm,需要使用结构胶进行胶结固定,选用微应力粘接方法,将胶层粘接应力与热应力变形控制在极小的范围内。利用ZYGO干涉仪获得光学系统的波前信息,将测得的波相差转化为初级像差,根据光学系统失调量与像差的关系对卡塞格林系统进行计算机辅助装调。调试后,系统的RMS值达到0.10λ,分辨率达到1″以内,检测结果表明:该系统的成像质量接近理论衍射分辨率,该方案可以实现快速定心,并且能够满足计算机辅助装调对定心精度的要求。The centering alignment scheme for the aspherical primary mirror of Cassegrain system in the use of three-coordinate measuring machine was presented,which could achieve rapid centering and meet the accuracy requirement in the process of computer-aided alignment.In order to reduce the mirror deformation because of adhesive stress and thermal stress to a minimal range,the microstress adhesive manner was used to position the mirrors,especially for the primary mirror of 300 mm aperture.The wavefront information of the Cassegrain system proposed in this paper was obtained with Zygo interferometer.With the primary aberration converted by the wavefront aberration measured above,the computer-aided alignment of the Cassegrain system could be completed according to the corresponding relationship between the misalignment and aberration of optical system.After alignment,the system root-mean-square(RMS)value reached 0.1λ,the solution was less than 1.The testing results show that the imaging quality of the system is close to the theoretical diffraction value,the centering alignment can achieve rapid centering and meet the accuracy requirement in the process of computer-aided alignment.

关 键 词：卡塞格林系统 主镜装调 计算机辅助装调 

分 类 号：O437[机械工程—光学工程] TP391.7[理学—光学]