光栅光谱仪光路结构的设计  

Design of grating spectrometer optical structure

作　　者：陈至坤[1,2] 王淑香 王玉田[1] 王福斌 

机构地区：[1]燕山大学河北省测试计量技术及仪器重点实验室,河北秦皇岛066004 [2]华北理工大学电气工程学院,河北唐山063009

出　　处：《应用光学》2015年第5期704-708,共5页Journal of Applied Optics

摘　　要：为提高光栅光谱仪的波长扫描精度,设计了一套可对光栅转动情况进行实时反馈的系统结构,实现了仪器在高速和高精度扫描上的统一。在对反馈结构进行设计时,应用光栅尺测位移技术对正弦丝杆上的滑块进行位移反馈,由计算机对其进行接收和处理。对比实验显示,仪器本身波长扫描精度为0.7nm,加入反馈电路进行反馈后波长扫描精度可达0.15nm。结果表明,加入对光栅转动情况的反馈结构后,可使光栅光谱仪满足高精度扫描要求。In order to improve the accuracy of wavelength scanning of grating spectrometer,we designed a set of real-time feedback system for grating rotation situation and implemented the instrument with both high speed and high precision scanning.In the design of feedback structure,we applied the grating displacement measuring technology to feedback the displacement of the slider on sine bar,and utilized the computer for receiving and processing it.Contrast experiment shows that the instrument accuracy of wavelength scanning is 0.7nm,after incorporating the feedback circuit,the wavelength scanning precision can reach 0.15 nm.Results indicate that after adding can the feedback structure of the grating rotation situation,the grating spectrometer satisfy the requirement of high precision scanning.

关 键 词：光栅光谱仪 步进电机 正弦机构 反馈控制 

分 类 号：TH744.1[机械工程—光学工程]