一种提高HWS采样率的透镜式微扫描方法  

Method for increasing HWS sampling rate on lens micro-scanning

作　　者：马辰昊[1] 付跃刚[1] 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《应用光学》2015年第5期768-773,共6页Journal of Applied Optics

基　　金：国家自然科学基金(61108044)

摘　　要：为改善传统哈特曼-夏克波前传感器对待测波前采样不足的缺点,对哈特曼-夏克波前传感器和微扫描进行了分析,提出一种提高哈特曼-夏克波前传感器采样率的透镜式微扫描方法。通过在微透镜阵列之前加入由PZT驱动的透镜扫描装置,对CCD采集的光斑分布情况进行高分辨率微扫描图像重建,通过对重建后的光斑分布进行波前重构,提高了哈特曼波前传感器对待测波前的采样率。通过对比实验验证,波前复原精度提高了41%,可以有效提高哈特曼传感器对波前探测的精度。In order to improve the shortcoming of insufficient sampling of measured wavefront in traditional Hartmann-Shack wavefront sensor(HWS),the Hartmann-Shack wavefront sensor and micro-scanning technology were analyzed,at the same time,the method of lens microscanning by raising the sampling rate in Hartmann-Shack wavefront sensor was proposed.The lens scanning device driven by PbZrTiO3(PZT)was added before the microlens array,and the high-resolution micro-scanning image was reconstructed for the spot distribution collected by the charge coupled device(CCD).After the wavefront reconstruction of the rebuilt spot distribution,the sampling rate of measured wavefront was improved in Hartmann-Shack wavefront sensor.Comparison experiments verify that the method can raise the recovered accuracy of wavefront by 41%,and it can effectively increase the accuracy of wavefront detection in Hartmann-Shack wavefront sensor.

关 键 词：应用光电子学 哈特曼-夏克波前传感器 透镜式微扫描 PZT驱动 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]