扫描电声显微镜在涂层缺陷检测中的应用  

Scanning Electron Acoustic Microscope Detection of Flaws in Coating Materials

作　　者：童兆和[1] 江福明[1] 丁传贤[1] 殷庆瑞[1] 

机构地区：[1]中国科学院上海硅酸盐研究所

出　　处：《无机材料学报》1992年第3期345-349,共5页Journal of Inorganic Materials

摘　　要：本文简述了扫描电声显微镜的成像过程,说明了电声显微镜所具有的非破坏性亚表面剖面成像能力,显示了它在检测涂层中气孔、裂纹、异质相等缺陷和涂层层状结构等方面的应用.Physical process of electron acoustic imaging with scanning electron acoustic microscope(SEAM) was reviewed.Its ability of imaging and detecting flaws including pore,crack,in-homogeneous phase and inter-lamellar texture in coating materials was shown in this paper.

关 键 词：电声显微镜 缺陷 涂层 

分 类 号：TQ630.72[化学工程—精细化工]