溶胶-凝胶光学薄膜的激光损伤研究  

Laser damage of Sol-Gel thin film

作　　者：杨帆[1] 沈军[1] 吴广明[1] 王珊[1] 肖轶群[1] 孙骐[1] 张志华[1] 付甜[1] 王珏[1] 

机构地区：[1]同济大学波耳固体物理研究所,上海200092

出　　处：《强激光与粒子束》2003年第5期439-443,共5页High Power Laser and Particle Beams

基　　金：~~

摘　　要：　采用溶胶 凝胶工艺制备了SiO2与ZrO2单层介质膜,用输出波长1.06μm,脉宽15ns的电光调Q激光系统产生的强激光进行辐照实验。观察了光学薄膜经强激光辐照后的损伤情况,讨论了溶胶 凝胶光学薄膜在强激光照射下的损伤机理,提出了溶剂替换、紫外光处理、添加有机粘接剂等提高溶胶 凝胶光学薄膜激光损伤阈值的方法。In this paper, colloidbased singlelayer SiO2 and ZrO2 thin films were deposited on K9 glass and silicon wafer substrates by SolGel spincoating method. The films were irradiated by a Qswitched Nd:YAG high power laser whose wavelength was 1064nm and its pulse width was 15ns. The morphologies of the damaged films were observed by SEM and microscope. Damage mechanics of the laser were studied. The results show that solventexchange , UVirradiation and the addition of PVP are effective methods to improve the laser damage threshold of SolGel thin films. .

关 键 词：溶胶-凝胶法 激光损伤阈值 溶剂替换 紫外光处理 有机粘接剂 

分 类 号：TN241[电子电信—物理电子学] O484.4[理学—固体物理]