振动与扫描速率综合影响SPM图像的实验研究  

Experimental study on integrated influence of external vibration and scanning rate upon SPM images

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作  者:陈津平[1] 胡晓东[1] 陈峰[1] 郭彤[1] 胡小唐[1] 

机构地区:[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出  处:《电子显微学报》2003年第3期242-246,共5页Journal of Chinese Electron Microscopy Society

基  金:教育部科学技术重点项目 (No.0 2 0 43 ) ;国家高技术发展专项经费资助项目 (No .2 0 0 2AA40 40 90 )

摘  要:探讨了外界激振对扫描探针显微镜 (SPM)图像的影响。针对DI扫描探针显微镜MultiModeTM SPM ,以Tektronix任意波形发生器AWG2 0 2 1驱动PC扬声器作为激振源 ,以SIOS微型激光干涉测振仪SP S为测振系统 ,研究了 0~ 7kHz频带内SPM机体的简谐迫振对扫描图像的影响。实验表明 ,针尖 -样品副所受激振影响不同于SPM机体 ;0~ 1kHz频带内的激振影响显著 ,再高频段则影响甚微 ;外界激振与SPM扫描的综合作用影响成像的结果 ;针尖This article was concentrated on the influence of external vibration on scanneing images of scanning probe microscope (SPM). The object studied was a DI MultiMode TM SPM. The external vibrating source was a PC speaker driven by a Tektronix ambient waveform generator AWG2021. A SIOS miniature interferometric vibrometer SP S was used as vibration measuring system. The influence of 0~7kHz harmonic vibration of SPM base on the scanning images was studied. The results of experiments were concluded as: external vibration influence on SPM base was different from the one on tip sample interaction; great influence of the external vibration appeared in 0~1kHz, and weak at higher frequency ranges; SPM image was influenced by the combination of external vibration and scanning rate; viscoelastic model of the tip sample interaction theory should be used to study the vibration influence on SPM.

关 键 词:扫描探针显微镜 SPM图像 扫描速率 外界激振 粘弹性模型 扫描频率 固有频率 针尖-样品副 

分 类 号:TP391.41[自动化与计算机技术—计算机应用技术]

 

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