合金在离子择优溅射中的表面元素局域富集效应  

EFFECT OF SURFACE LOCAL ENRICHMENT ON PREFEREN-TIAL SPUTTERIONG OF ALLOY

作　　者：王震遐[1] 潘冀生[1] 章骥平[1] 陶振兰[1] 

机构地区：[1]中国科学院上海原子核研究所,上海201800

出　　处：《物理学报》1992年第10期1722-1727,共6页Acta Physica Sinica

基　　金：国家自然科学基金

摘　　要：用27keV Ar^+离子对Ni-50wt％ Ti,Fe-30wt％ W和Ag-50wt％ Cu合金进行溅射,发现Ti,Fe和Ag原子在小角区择优发射。与此同时,扫描电子显微镜(SEM)结合电子探针微分析(EPMA)显示所有样品的靶点表面形貌均由凸起和凹陷两种微区组成的特征,并且各种微区具有不同的元素富集。用据此提出的模型对各合金组分的溅射原子角度择优发射特点进行分析,得到了与实验符合的结果。The angular distributions of atoms sputtered from Ni-50Wt%Ti, Fe-30Wt%W and Ag-50Wt%Cu alloys by 27keV Ar+ ions bombardment nave been masured. It has been found that Ti, Fe and Ag atoms were sputtered preferentially at small angles. The sputtered surfaces have been analyzed by SEM combined with EPMA. It has been showed that all the surface topographies of three samples consisted of two different parts i.e. convex and concave regions, corr responding dif ferent components being richer at different region. A model has been suggested to explan this phenomenon.

关 键 词：表面 离子 合金 溅射 富集 角分布 

分 类 号：TG17[金属学及工艺—金属表面处理]