电热激励微悬臂梁谐振器输出电压影响因素研究  

The Study on the Factors Infl uencing the Output Voltage of Electr othermally Excited Microcantilever Resonators

作　　者：韩建强[1] 朱长纯[1] 刘君华[1] 魏培永[1] 

机构地区：[1]西安交通大学电信学院,西安710049

出　　处：《固体电子学研究与进展》2003年第4期504-507,519,共5页Research & Progress of SSE

基　　金：国家自然科学基金 (60 0 3 60 16;50 0 770 16);教育部开放基金 (CETD0 0 -10 )资助

摘　　要：制作了电热激励硅 /二氧化硅双层微悬臂梁谐振器。对影响谐振器输出电压的因素研究结果表明 :减小梁宽度、硅层厚度、环境气压和温度 ,可增大微悬臂梁谐振器输出电压 ;输出电压随激励功率增加而增大 ;谐振器输出电压与谐振器根部压敏电桥电源电压成正比。Si/SiO 2 double-l a yer micromechanical cantilever resonato rs with electric-thermal excitation are fabricated by microelectronic and microm echincal technologies. The study on the factors influencing the output voltage o f the resonators shows that: (i)the outp ut voltage increases with decreasing the broad of beam, the thickness of the sil icon layer, ambient pressure and temper ature; (ii)the output voltage increases with excitation power; (iii)the output v oltage increases directly proportional t o DC voltage applied on the Wheatstone br i dge at the clamped end of beam. At last, the feasible method of increasing the v oltage of resonators is discussed.

关 键 词：电热激励 微悬臂梁 谐振器 输出电压 压敏电桥 硅微机械谐振式传感器 

分 类 号：TN751.2[电子电信—电路与系统] TP212[自动化与计算机技术—检测技术与自动化装置]