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出 处:《微纳电子技术》2003年第7期543-545,共3页Micronanoelectronic Technology
基 金:973国家重大基础研究项目 (G2 0 0 0 0 2 64 0 4)
摘 要:采用一种无模板的化学气相沉积法 ,在石英衬底上制备了大面积 ,高定向性、自支撑的碳纳米管阵列。二甲苯和二茂铁分别作为碳源和催化剂 ,连续进给到反应装置中 ,在一定温度条件下 ,碳纳米管自组织生成垂直于衬底方向的定向阵列。这种方法可以获得很高的生长速度 ,其最大长度可以达到几个毫米。A non template CVD method was adopted to prepare large scaled, highly directional and self standing carbon nanotubes arrays on quatz substrate. Xylene was used as carbon source, and ferrocene as catalyst. At a certain temperature, the solution of xylene and ferrocene was continuously fed in the reaction set and the self assembly growth of aligned carbon nanotubes vertical to the substrate was attained. Using this method, a rapid growth rate and very long growth length up to several millimeters can be gained. The carbon nanotubes as grown have high purity and high graphitization were demonstrated by Raman spectrum and HRTEM.
关 键 词:碳纳米管阵列 大规模制备 定向排列 化学气相沉积法
分 类 号:TB383[一般工业技术—材料科学与工程] TN304.18[电子电信—物理电子学]
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