分子沉积膜的纳米压痕试验  

Nano-indentation of Molecular Deposition Film

作　　者：兰惠清[1] 张嗣伟[2] 李德才[1] 冯大鹏[2] 

机构地区：[1]北方交通大学机械与电子控制工程学院,北京100044 [2]石油大学机电学院,北京102200

出　　处：《机械工程材料》2003年第9期40-41,51,共3页Materials For Mechanical Engineering

基　　金：国家自然科学基金资助项目(50175076);北方交通大学校科技基金资助项目(2002RC031)

摘　　要：制备了金衬底表面上的分子沉积膜,用原子力显微镜观测了其表面形貌;用纳米压痕仪研究其纳米力学特性。结果表明,沉积一层膜后衬底表面的弹性模量、硬度都减小,而且弹性变形增加,塑性变形减小,从而证明膜改善了金衬底的力学特性。ZThe molecular deposition film deposited on Au substrate was prepared and its topography was investigated using an atomic force microscope. Its nano mechanical properties were studied using a nanoindenter. The results showed that after the film was deposited on the Au substrate, the modulus of elasticity, hardness all decreased, moreover, the elastic deformation increased and the plastic deformation decreased, indicating that the molecular deposition film can improve the nano mechanical properties of the Au substrate.

关 键 词：分子沉积膜 纳米压痕 力学性能 

分 类 号：TB383[一般工业技术—材料科学与工程]