原位法制备AlN-TiN复相陶瓷性能的研究  

Research on AlN-TiN Composite Ceramics Prepared by In-situ Method

作　　者：杨群[1,2,3] 王玉春[1,2,3] 李晓云 冯永宝[1,2,3] 杨建[1,2,3] 丘泰[1,2,3] 

机构地区：[1]南京工业大学材料科学与工程学院,江苏南京210009 [2]江苏先进无机功能复合材料协同创新中心,江苏南京210009 [3]南京三乐电子信息产业集团有限公司,江苏南京210032

出　　处：《真空电子技术》2016年第5期26-29,共4页Vacuum Electronics

摘　　要：以Y_2O_3(5%)(质量比)和TiO_2为添加剂,采用无压烧结工艺在1900℃、N_2气氛下原位法制备了AlN-TiN复相陶瓷,研究了不同TiO_2含量对复相陶瓷物相组成、致密性和导热性能的影响。结果表明:1900℃烧成温度下,复相陶瓷主晶相为AlN和TiN,次晶相为Al_2O_3和YAlO_3,TiO_2与AlN反应原位生成了TiN。适量的Y_2O_3-TiO_2添加剂能够对AlN-TiN复相陶瓷起到促进烧结的作用。随着TiO_2含量的增加,材料的气孔率呈先减小再增大的趋势,材料的热导率呈下降趋势。当TiO_2添加量为6%时,材料的显气孔率最低,为0.21%,相应热导率为104 W/m·K。With Y_2O_3(5%(wt)),TiO_2 and AlN as law materials,AlN-TiN composites were fabricated by non-pressure sintering at 1900 ℃ in N_2 atmosphere.The effects of TiO_2 content on microstructure,densification and thermal conductivity of composite ceramics were characterized.It shows that the main phases of samples are AlN and TiN,and the secondary phases are YAlO_3 and Al_2O_3.TiO_2 and AlN reaction in-situ generates TiN.Proper content of additives will benefit the sintering of AlN-TiN ceramics.As the content of TiO_2 increase,the porosity of the material first decline and then rise,while the thermal conductivity of the material decline.When the content of TiO_2 is 6wt%,the multiphase ceramics have the minimum porosity of 0.21% and the corresponding thermal conductivity is 104 W/m·K.

关 键 词：氮化铝 二氧化钛 无压烧结 致密性 导热性能 

分 类 号：TQ174.1[化学工程—陶瓷工业]