TiO_2/Ag/TiO_2纳米多层膜的研究  

TiO_2/Ag/TiO_2 Nano-multilayer

作　　者：李景明[1] 蔡珣[1] 茅及放[1] 

机构地区：[1]上海交通大学教育部高温材料及高温测试重点实验室,上海200030

出　　处：《机械工程材料》2004年第2期34-37,共4页Materials For Mechanical Engineering

摘　　要：设计和制备了用于平面显示器透明电极的纳米多层薄膜TiO2/Ag/TiO2,它的明视透光率Tlum约为89.3%,在2500nm波长处的反射率R2500>95%,方块电阻为3.0Ω/cm2,在550nm波长处的电气性能评价指标FTC=137×10-3Ω-1。发现顶层介质折射率的变化将会引起膜系透射峰的水平移动,而底层介质折射率的变化将仅仅影响膜系透射峰的高低。TiO_2/Ag/TiO_2 transparent conductive nano-multilayers for application to transparent electrodes in flat panel display devices were prepared by vacuum thermal evaporation deposition. The sheet resistance of the films is low as 3Ω/cm^2. They can be used as good selective filters because of their luminous transmittance around 89.3% and IR reflectivity above 95% at 2 500nm wavelength. The merit index F_(TC) for evaluating transparent electrodes can reach 137×10^(-3)Ω^(-1) at 550nm wavelength. It was found that the changes of refractive index of upper layer dielectric would make transmittance peak move horizontally while the changes that of lower layer dielectric only affect the height of transmittance peak.

关 键 词：透明电极 纳米多层膜 光学性能 导电性能 

分 类 号：TG174.444[金属学及工艺—金属表面处理]