X射线衍射和散射光束线环面聚焦镜的面形精度与像差分析  

Slope error and aberration analysis for XRDX beamline toroidal focusing mirror

作　　者：黄志刚[1] 董晓浩[1] 高飞[1] 徐朝银[1] 

机构地区：[1]中国科学技术大学国家同步辐射实验室,安徽合肥230029

出　　处：《光学精密工程》2004年第1期26-30,共5页Optics and Precision Engineering

摘　　要：介绍了用于NSRL的X射线衍射和散射光束线中环面聚焦镜的成像原理和基本结构,分析计算了各种像差和面形精度对成像质量的影响,重点描述了镜子因受力弯曲在子午方向的曲率变化与理论值的误差以及反射表面受同步辐射光照射而产生的热载变形,进而求得实验样品上束斑成像的高度。最后用CCD探测实际光斑的尺寸,结果表明:理论计算与实测数据非常吻合。A long cylindrical mirror bent into a toroidal shape in a special mechanism is usually used to focus the synchrotron radiations in both horizontal and vertical directions of X-ray beamline. The imaging principle and structural parameters of a XRDX beamline toroidal focusing mirror for NSRL use are discussed, the effect of aberrations and slope errors on the imaging quality is analyzed, the variation of curvature in meridional direction due to mirror bending, the error for theoretical value, and the thermal distortion resulting from the incident beam are discussed in detail. The actual measurements made with Marcam CCD camera showed that the theoretical calculations are in very good agreement with the actual measurements.

关 键 词：环面聚焦镜 面形误差 像差 同步辐射 X射线衍射 面形精度 

分 类 号：TL5[核科学技术—核技术及应用] O43[机械工程—光学工程]