真空计量的新进展  

The Latest Developments of Vacuum Metrology

作　　者：李得天[1] 

机构地区：[1]兰州物理研究所

出　　处：《上海计量测试》2003年第5期4-10,共7页Shanghai Measurement and Testing

摘　　要：真空计量学已发展成为计量学的一个新的独立分支,其研究内容已从传统的全压力测量与校准扩展到分压力测量与校准、气体微流量(漏率)测量与校准。本文描述了这三个方面的最新进展,从中可看出真空计量学的现状与发展趋势。Vacuum metrology has been developed to be a new branch of metrology, whose concerned fields have been extended from the traditional total pressure measurement and calibration to the partial pressure measurement and calibration, and the gas micro-flow (leak rate) measurement and calibration. The latest developments of these three fields are described, from which the current status and developing trend of vacuum metrology can be found.

关 键 词：真空计量学 全压力测量 分压力测量 气体微流量测量 全压力校准 发展趋势 

分 类 号：TB772-4[一般工业技术—真空技术]