反应烧结碳化硅球面反射镜的光学加工与检测  

Optical surfacing of spherical reaction-burned silicon carbide(RB-SiC) mirror

作　　者：范镝[1] 张忠玉[1] 牛海燕[1] 丰玉琴[1] 张学军[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所光学技术中心,长春130022

出　　处：《光学技术》2004年第1期6-8,共3页Optical Technique

基　　金：国家杰出青年基金资助项目(No.69925512)

摘　　要：介绍了250mm口径、4200mm曲率半径的反应烧结碳化硅球面反射镜光学加工和检测的工艺流程;并按照流程依次介绍了在研磨成型、细磨抛光和精抛光过程中使用的机床、磨具、磨料及采用的工艺参数和检测方法。介绍了在光学加工和检测各个步骤中应注意的问题。展示了加工后250mm口径反应烧结碳化硅球面反射镜的实物照片,并给出了面形精度和表面粗糙度的检测结果:面形精度(95%孔径)均方根值(RMS)为0.037波长(λ=632.8nm),表面粗糙度RMS值达到1.92nm(测量区域大小为603.6ⅹ448.4μm)。Optical surfacing and testing process of 250mm spherical reaction-burned silicon carbide(RB-SiC) mirror are mentioned. The machine, tools, abrasives, technology and testing method used in the grinding and polishing are introduced. Some issues frequently occurred in the optical surfacing and testing process are mentioned. Some testing results of surface figure and surface roughness are given. It's showed that the surface figure (RMS, root mean square) is 0.037 wavelength(λ=632.8nm) and surface roughness (RMS) is 1.92nm (measure area 603.6ⅹ448.4μm ). And the photograph of the mirror is showed.

关 键 词：反应烧结碳化硅 光学加工 面形精度 粗糙度 球面反射镜 空间光学系统 

分 类 号：TH74[机械工程—光学工程] TQ171.684[机械工程—仪器科学与技术]