单片式ZnO—SiO_2—Si结构西沙瓦波卷积器  

Sezawa Wave Convolver With ZnO/SiO2/Si Structure

作　　者：周子新[1] 陈运祥[1] 谢兵[1] 朱昌安[1] 

机构地区：[1]四川压电与声光技术研究所

出　　处：《压电与声光》1992年第5期76-78,75,共4页Piezoelectrics & Acoustooptics

摘　　要：本文简述了单片式ZnO—SiO_2—Si结构西沙瓦波卷积器的原理、结构、设计、制作和实验结果,以及该器件的优点和应用前景。最后讨论了Si衬底切割和传播方向的最佳选择及增大带宽的途径。The paper briefly described the principle, .structure,design :nehtod,fb-rication process and experimental results, as well as the advantages of sczawa wave convolver with. m,onolithic ZnO/SiO2/Si structure and its application prospect.Finally, the optitnal selection of cut Si substrate and propagating direction,and the ways enhanced bandwidth are discussed.

关 键 词：西沙瓦波 卷积器 SAW 信息处理 

分 类 号：TN65[电子电信—电路与系统]