加槽石英微天平粘度密度传感器的分析与优化  

Analysis and Optimization of Grooved QCM for Sensing Density & Viscosity

作　　者：常浩[1] 王琪民[1] 邓轶[1] 

机构地区：[1]中国科学技术大学精密机械与精密仪器系,合肥230027

出　　处：《中国科学技术大学学报》2004年第1期98-104,共7页JUSTC

基　　金：中国科学院"引进国外杰出人才"项目;"微机电系统中结构和材料的机电行为和特性研究"

摘　　要：提出一种用有限元方法计算石英微天平谐振频率变化的有效方法 .运用此方法分析了用加槽石英微天平分别测量液体粘度及密度的原理 ,解释了前人的实验结果 .对影响传感器灵敏度的微槽深度、宽度、周期、微槽侧壁倾角及石英微天平的振动频率进行了分析。Density and viscosity are important physical properties of liquid. Sensing density and viscosity is of great practical importance in science and engineering. Grooved QCM is a promising new type of sensor which can sense the density and viscosity of liquid respectively. It may be very useful in biology, chemistry, engineering and medicine. But now the principle of the sensor is not quite clear, and researchers also have no idea about how to promote the sensitivity of the sensor. Because of the complexity of the problem, finite element method is an appropriate method to delve the principle and optimize the sensor. A finite element method based on the concept of mechanical impedance for computing the frequency shift of QCM was developed and proved effective. The method was used to analyze the principle of sensing density and viscosity with grooved QCM. From the result some experimental results can be explained and a theoretical model proposed by a former researcher was proved incorrect.This method was also used to analyze and optimize the factors that affect the sensitivity of the sensor which include the period, depth, width, and angle of the wall of the groove and the vibration frequency of QCM. It was found that decreasing the period and angle of the wall, increasing the depth and vibration frequency and selecting proper width can all promote the sensitivity. But when sensor designers use the first four methods to promote sensitivity, they should trade off between the sensitivity and difficulty in fabrication. The results can provide some meaningful references for sensor designers.

关 键 词：石英微天平 密度 粘度 优化 微槽 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]