应用SMIF技术促进高量产Fab的更新升级  

Using SMIF technology to help retrofit a high-volume fab

作　　者：John Ort Roy Hanter Chris Hnmphreys 

机构地区：[1]Texas Instruments,Texas USA,Texas Instruments,Texas USA,Asyst Technologies,California USA

出　　处：《电子工业专用设备》2004年第3期69-73,共5页Equipment for Electronic Products Manufacturing

摘　　要：鉴于芯片特征尺寸不断缩小,制造技术不断推进许多工厂面临挑战。为了降低成本减少风险,对现有的操作冲击最小,德州仪器公司(TI)选用标准机械接口(SMIF)技术作为fab的设施升级手段。本文讨论了选用SMIF技术的原因,公司预期项目的结果,以及使选用的SMIF系统可能产生的负面效应降低到最低。关于安装和工艺判定随项目的结果评述。Many existing fabs are faced with challenges resulted from geometry shrink and technology ad-vancement.With lowest cost,minimum risk,and least disruption to the existing operation,TI chose to use SMIF(standard mechanical interface)technology as the means to upgrade fab's facilities.This article dis-cusses the reasons why SMIF technology was selected,the company's expectations regarding the project's outcome,and the steps taken to minimize any adverse effects related to the adoption of SMIF systems.The installation and qualification processes are also described,along with project results.

关 键 词：标准机械接口(SMIF) SMIF小室 自动物料处理系统(AMHS) SMIF围护 SHIF标识符 

分 类 号：TN305[电子电信—物理电子学]