激光气相法研制硅系超微粉  

Synthesis of Silicon Series Ultrafine Powders by Laser Lnduced Vapor—phase Reaction Method

作　　者：郭广生[1] 安志棠 高晓云[1] 贺晓冬[1] 王伟洁[1] 张敬畅[1] 杨福明[1] 

机构地区：[1]北京化工学院,北京100029

出　　处：《应用激光》1992年第5期223-226,共4页Applied Laser

摘　　要：用150W连续CO_2激光器为光源,以SiH_4气体为主原料,合成了超微Si、Si_3N_4、SiC粉末。研究了反应条件对超微粉性能的影响,并探索用廉价的原料代替SiH_4的可能性。该研究具有很好的工业应用前景。The ultrsgine powders of Si, Si_3N_4 and SiC is successfully prepared with a 150W CW CO_2 laseras light source and SiH_4 as main raw-material. The influence of experimental conditions on properties of ul-trafine powders is invertigated. The possibility of substitution of SiH_4 with cheaper materials is also discussed. This study is expected to have a good prospects in industrial applications.

关 键 词：激光化学 超微粉末 合成 硅系 

分 类 号：O644.8[理学—物理化学]