一种可适应复杂互连电容结构的边界元形体处理方法  

An Efficient Boundary Generation Method for Arbitrary Complex Structures in Parasitic Capacitance Extraction

作　　者：喻文健[1] 王泽毅[1] 王玉刚[1] 陆涛涛[1] 陈瑞明[1] 

机构地区：[1]清华大学计算机科学与技术系,北京100084

出　　处：《Journal of Semiconductors》2004年第2期214-220,共7页半导体学报（英文版）

基　　金：国家高技术研究发展计划 ( No.2 0 0 2 AA1Z14 60 SOC);美国 Anchor Sem iconductor公司资助项目~~

摘　　要：针对当前集成电路中日益复杂的互连结构 ,提出了一种边界元电容提取中的形体处理方法 ,可适用于填充气隙、保形介质、多平面介质 ,以及任意复杂的寄生电容结构 .在该处理方法中采用多叉树组织三维形体对象 ,并有效地生成区域边界表面的信息 .数值实验表明 ,该方法拓宽了边界元电容提取处理复杂结构的能力 ,且具有较高效率 .For the complex interconnect structures in the integrated circuits,an efficient method is proposed to process the geometric objects in the capacitance extraction using the boundary element method.In the method,a multiple tree is used to store the three-dimensional objects,and the boundaries of medium regions are efficiently generated.Because of the advantage of the data organization and boundary generation algorithm,the BEM becomes capable of handling the complex capacitor with structures including an air gap,conformal dielectric,multi-plane dielectric,and even arbitrary complex structures.Numerical experiment reveals that this method greatly extends the ability of the boundary element method for handling complex structure,and it is also of high efficiency.

关 键 词：寄生电容 复杂互连结构 边界元法 形体处理 

分 类 号：TN405[电子电信—微电子学与固体电子学]