化学溶液分解法制备的Bi_2Ti_2O_7薄膜的红外光学性质研究  

INFRARED OPTICAL PROPERTIES OF Bi_2Ti_2O_7 THIN FILMS PREPARED BY CHEMICAL SOLUTION DECOMPOSITION TECHNIQUE

作　　者：胡志高[1] 王少伟[1] 黄志明[1] 吴玉年[1] 陆卫[1] 褚君浩[1] 

机构地区：[1]中国科学院上海技术物理研究所红外物理国家重点实验室,上海200083

出　　处：《红外与毫米波学报》2004年第1期47-50,共4页Journal of Infrared and Millimeter Waves

基　　金：国家重点基础研究专项经费资助项目 (G0 0 1CB3 0 95 )

摘　　要：采用化学溶液分解法在n GaAs(10 0 )衬底上制备了Bi2 Ti2 O7薄膜 .利用红外椭圆偏振光谱仪测量了波长为2 .8～ 12 .5 μm范围内Bi2 Ti2 O7薄膜的椭偏光谱 ,采用Lorentz Drude色散模型拟合获得Bi2 Ti2 O7薄膜的红外介电常数 ,并进一步计算得到折射率n、消光系数k和吸收系数α ,拟合计算得到Bi2 Ti2 O7薄膜的厚度为 139.2nm .Bi-2 Ti-2 O-7 thin films were deposited on n-GaAs (100) by chemical solution decomposition technique. The infrared optical properties of the thin films were measured by infrared spectroscopic ellipsometry in the wavelength range of 2.8 similar to 12.5 mum. Lorentz-Drude dispersion model was used to express the infrared dielectric constants of the Bi-2 Ti-2 O-7 thin films, and the refractive index n, the extinction coefficient k and the absorption coefficient alpha of the thin films were calculated. The thickness of the Bi2Ti2O7 thin films was obtained as 139.2 nm by fitting.

关 键 词：化学溶液分解法 铋钛氧薄膜 红外光学性质 红外椭圆偏振光谱仪 Lorentz-Drude色散模型 消光系数 折射率 吸收系数 

分 类 号：O484.5[理学—固体物理] TN204[理学—物理]