固支梁微传感器等效电路宏模型及IP库的建立  

Creation of the Macromodel of Equivalent Circuit and IP Library for Clamped-Clamped Beam Microsensor

作　　者：闻飞纳[1] 李伟华[1] 戎华[1] 

机构地区：[1]东南大学微电子中心

出　　处：《固体电子学研究与进展》2004年第1期68-72,122,共6页Research & Progress of SSE

基　　金：国家(8 63计划)资助项目(课题编号 :2 0 0 2 AA40 40 10);教育部重大项目(重大 0 2 16)

摘　　要：针对 MEMS器件中的固支梁结构 ,采用了 SPICE中标准多项式受控源的形式和模态分析的方法 ,运用 F-I类比的电路形式建立了固支梁微传感器的多模态小信号等效电路宏模型 ,并建立了相应的 IP模型库单元。在外加力作用下 ,用 SPICE软件调用固支梁的 IP库并结合外加电路进行了系统级的模拟 ,得到微传感器分布参数的电学参量输出特性曲线 ;最后采用Aimed at the clamped-clamped beam structure of MEMS devices, standard polynomial controlled sources of SPICE and modal analysis are introduced to build the multi-modal small-signal macromodel of equivalent circuit for the clamped-clamped beam microsensor. Corresponding IP library model is then created. Under the outside force load, the output electrical parameters' characteristic of distributed-parameter clamped-clamped beam microsensor is presented by adopting the IP library and taking system-level simulation including the periphery circuits with SPICE. The resonance frequencies of each modal and related curves of the model are verified with the COVENTORWARE software.

关 键 词：MEMS 固支梁 受控源 微传感器 等效电路 宏模型 IP库 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH-39[自动化与计算机技术—控制科学与工程]