飞秒激光在材料微加工中的应用  

Progress of femtosecond laser micromachining

作　　者：贾威[1] 王清月[1] 傅星[1] 胡小唐[1] 

机构地区：[1]天津大学精密仪器与光电子工程学院超快激光研究室

出　　处：《量子电子学报》2004年第2期194-201,共8页Chinese Journal of Quantum Electronics

基　　金：教育部科学技术研究重大项目(光通信系统中的微型光电器件的研究)资助

摘　　要：本文介绍了飞秒激光的特性以及超短脉冲激光与材料相互作用的机理,并着重指出了其与长脉冲激光的区别。飞秒激光可产生超高光强、具有精确的损伤阈值(并且损伤阈值较低较低)、很小的热影响区、几乎可精密加工所有种类材料,并且,加工精度极高,可进行亚微米尺寸的精密加工。通过分析飞秒激光材料微加工的特性,综述超短脉冲激光材料微加工的应用研究现状。The properties of femtosecond laser and the mechanisms of femtosecond laser micromaching are introduced, the differences to that of long-pulse laser are emphasized. Femtosecond laser produce high intensity and offer precision breakdown threshold with lower laser fluence. The femtosecond laser micromachining has a very limited heat-affected volume. These advantages of femtosecond laser could be applied in precision micromachining of various materials. Femtosecond laser micromaching can have a micron and submicron feature size. Some femtosecond laser micromachining results, including comparison with long-pulse, are discussed, and the widespread application prospect is described.

关 键 词：飞秒激光 损伤阈值 激光微加工 多光子吸收 光子晶体 

分 类 号：TN24[电子电信—物理电子学]