PSD激光测微仪的研制与精度分析  

The development of PSD laser Measuring Micro-Displacement Instrument and Its Accuracy Analysis

作　　者：金泰义[1] 李胜利[1] 徐育[1] 郦明 

机构地区：[1]中国科学技术大学精密机械与仪器系

出　　处：《中国科学技术大学学报》1992年第3期348-353,共6页JUSTC

摘　　要：介绍PSD激光测微仪的结构及特点。根据输入输出参数方程及误差测量结果进行数据处理和误差分离,确定了仪器的系统误差和随机误差。这一工作为系统误差补偿和提高仪器测量精度提供了依据。In this paper, the characteristics and structure of PSD laser measuring micro-displacement instrument are introduced. According to the equation of input and output as well as the error sources, the accuracy of the instrument is analysed. The system error and random error of the instrument are determinod by processing the data of measurement results. Based on the above-mentionod analysis, we can compensate for errror and improve measurement accuracy of the instrument.

关 键 词：在线检测 精度分析 激光测微仪 PSD 

分 类 号：TH744.5[机械工程—光学工程]