鼓膜法测定纳米多孔氧化铝薄膜的弹性模量  

Elastic Modulus of Nanoporous Alumina Films through Bulge Test

作　　者：辜萍[1] 缪泓[1] 柳兆涛[1] 伍小平[1] 

机构地区：[1]中国科学技术大学力学和机械工程系中国科学院材料力学行为与设计重点实验室,合肥230027

出　　处：《实验力学》2004年第1期34-38,共5页Journal of Experimental Mechanics

基　　金：国家自然科学基金项目(10302026)

摘　　要：本文的多孔氧化铝薄膜含有直径均一、互相平行且与表面垂直的有序纳米孔阵列。它有广阔的应用前景。多孔氧化铝膜与氧化铝陶瓷材料的宏观力学性能有很大的区别。本文用鼓膜法结合实时电子散斑干涉(ESPI)技术,测量薄膜压力与离面位移的关系,再用周边固支平板小挠度模型计算出多孔氧化铝薄膜的宏观弹性模量。本实验中厚76微米的多孔氧化铝薄膜的宏观弹性模量为32.5GPa,比热压氧化铝陶瓷的弹性模量几乎小一个数量级,主要是由于晶相和细观结构不同造成的。这种方法较适合测量此类结构薄膜的力学性能。Nanoporous alumina films contain parallel regular pores of uniform size which are normal to substrate surface. Due to their fine pore structures the porous films are potential for many applications, such as templates in nanoassembly and filtering films in separation. However, there are great differences in mechanical properties between the nanoporous alumina films and alumina ceramics. This paper presents a method for determining the elastic modulus of the Nanoporous alumina films by obtaining the continuous out-of-plane displacement and current load of the porous films through bulge test in conjunction with real-time ESPI (electronic speckle pattern interferometry) observation system. The elastic modulus then calculated was based on an analytical model of low flexibility deformation of clamped circular disk under uniform pressure. In our experiment, the elastic modulus of the sample whose thickness is 76μm was evaluated to be 32.5GPa, which is an order of magnitude lower compared with the value of the alumina ceramics. The gap between these values may result from different crystal phases and mesostructures and the reason for selecting the analytical model of low flexibility deformation of clamped circular disk under uniform pressure is discussed. This method may be useful and convenient for mechanical test on films with such structures, but further investigation is needed on the relationship of micro-meso structure and mechanical properties of materials.

关 键 词：鼓膜法 纳米多孔氧化铝薄膜 弹性模量 电子散斑干涉术 纳米孔阵列 离面位移 

分 类 号：TB383[一般工业技术—材料科学与工程] O484.2[理学—固体物理]