A Novel Approach to Synthesizing Porous ZnO Films: Inorganic Chelating Sol-Gel Method  

无机络合溶胶-凝胶法制备多孔ZnO薄膜(英文)

作　　者：杨立荣[1] 靳正国[1] 步邵静[1] 程志捷[1] 

机构地区：[1]天津大学材料学院先进陶瓷与加工技术教育部重点实验室,天津300072

出　　处：《Journal of Semiconductors》2004年第3期241-246,共6页半导体学报（英文版）

基　　金：天津市自然科学基金资助项目 (批准号 :3 3 80 2 3 11)~~

摘　　要：Porous ZnO films are synthesized by inorganic chelating sol-gel method,which is a novel sol-gel technique using zinc nitrate as starting materials and citric acid as the chelating reagent.The crystal structure,surface morphology,porous and optical properties of the deposited films are investigated.X-ray diffraction pattern analysis shows that crystal structure of the ZnO films is hexagonal wurtzite.Scanning electron microscopy (SEM) shows that the ZnO film is porous.The curve of pore size distribution has two peak values at about 2.02nm and 4.97nm and BET surface area of the ZnO film is 27.57m2/g.In addition,the transmittance spectrum gives a high transmittance of 85% in the visible region and optical bandgap of the ZnO film (fired at 500℃) is 3.25eV.利用无机络合溶胶 -凝胶法制备多孔 Zn O薄膜 ,同时利用多种测试手段对薄膜的晶体结构、表面形貌、多孔和光学性能进行了研究 .XRD和 SEM的测试结果表明 ,Zn O薄膜的晶体结构为六方纤锌矿 ,薄膜表面呈多孔状 .由孔径分布曲线得出薄膜的孔主要集中在介孔 2 .0 2 nm和 4 .97nm ;5 0 0℃煅烧得到的 Zn O薄膜的比表面积是2 7.5 7m2 /g;在不同温度下煅烧的薄膜在可见光区域透射率均高于 85 % ,光学带宽为 3.2 5 e V.

关 键 词：porous ZnO film inorganic chelating sol-gel method pore size distribution PROPERTIES 

分 类 号：TN304.05[电子电信—物理电子学]