提高激光反馈扫描显微镜轴向分辨率的实验研究  

Experimental Study on Improving Axial Resolution of Scan Microscope

作　　者：丁迎春[1] 张书练[1] 李岩[1] 朱均[1] 

机构地区：[1]清华大学精密仪器与机械学系精密测试技术与仪器国家重点实验室,北京100084

出　　处：《中国激光》2004年第5期551-553,共3页Chinese Journal of Lasers

摘　　要：提出并实验研究了几种可以提高激光反馈扫描显微镜轴向分辨率的方法 ,一种方法是对常规激光反馈实验中的探测技术进行了改进 ,用渥拉斯顿棱镜把垂直偏振光分开探测 ,轴向分辨率可以提高约 2 9倍 ;另一种方法是用双频激光器中产生的偏振态相互垂直的o光和e光作为反馈光代替了传统的单一光的反馈 ,轴向分辨率被提高了约 2倍 ;第三种方法是用双频激光器中产生的o光或e光作为反馈光 ,轴向分辨率可以提高约 2 5倍。实验结果表明 ,利用偏振态相互垂直的光之间的模竞争效应可以有效地提高扫描显微镜的轴向分辨率。In this paper, several methods are put forward, by which axial resolution of scan microscope could be improved. One is that detecting method of ordinary laser feedback is improved, the orthogonal polarized lights split by Wollaston prism are detected separately, comparing to the ordinary feedback, the axial resolution is improved about 2.9 times. Another is that the orthogonal polarized lights, o light and e light, generated by dual frequency laser, is used instead of ordinary feedback light, the axial resolution is improved about 2 times. The last is that o light or e light is as the feedback light, the axial resolution is improved about 2.5 times. The experimental results indicate that mode competitive effects of orthogonal polarized lights can effectively improve axial resolution of scan microscope.

关 键 词：激光技术 激光反馈 激光频率分裂 轴向分辨率 

分 类 号：TH741.8[机械工程—光学工程] TH742.64[机械工程—仪器科学与技术]