补偿扩散硅压力传感器灵敏度温漂的新方法  

A New Compensation Method for the Temperature Drift of Diffused Silicon Pressure Transducer

作　　者：胡贵池[1] 范玉玲[1] 倪礼真 

机构地区：[1]中科院合肥智能机械研究所

出　　处：《自动化仪表》1992年第10期12-15,共4页Process Automation Instrumentation

摘　　要：首先分析了扩散硅压力传感器灵敏度温漂的影响,然后以恒压激励方式的典型补偿电路为例,通过推导,提出一种在桥路中串入电阻的补偿方法。经测试数据的比对,证明该补偿方法切实可行,提高了传感器的性能。The effects of temperature on the sensitivity of diffused silicon pressure transducer are analyzed. With the example of typical compensation circuit using constant voltage supply, a compensation method of connecting resistance in the bridge is stated. The intercomparison of the test data shows that the compensation method is feasible and the performance of the transducer is improved.

关 键 词：压力传感器 灵敏度 补偿 温漂 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]