等离子体金属表面氮化中放电温度对氮原子态粒子的影响  

The Effect of Discharge Temperature upon Atomic Species in Plasma Nitriding of Steel Surface

作　　者：张连珠[1] 于富强[1] 孔令宜[1] 何琪[1] 

机构地区：[1]河北师范大学物理学院,河北石家庄050016

出　　处：《计算物理》2004年第2期173-178,共6页Chinese Journal of Computational Physics

摘　　要：　采用快电子和重粒子(N+2,N+,Nf)混合的Monte Carlo模型,研究了氮直流辉光放电等离子体金属表面氮化过程中.e N2s及N+2 N2s两种碰撞离解过程产生的原子态粒子(N+,N)的产生率和氮化粒子(N+,Nf)轰击靶表面的能量、粒子数密度及入射角分布随气体温度的变化规律.结果表明,使阴极靶处活性粒子(N+,Nf)的能量高且粒子数密度大,存在一个最佳放电温度;粒子(N+,N)的产生率及在靶表面的密度数都随着放电气体温度的升高而减少;有大量中性快原子Nf在工件表面小角入射,且粒子(N+,Nf)角分布受温度的影响很小.Based on a combination of Monte Carlo models of fast electrons and species(N^+\-2,N^+,N\-r), Creation rates of atomic species(N^+,N) and energy, density and angular distribution of species(N^+,N\-f) bombarding negative target in nitrogen dc discharge plasma-assisted nitriding of steel surface are investigated for e^-+N(2s)→N^++N\-s+2e^-及N^+\-2+N(2s)→N^++N\-s+N\-2. It is found that these is an optimum discharge temperature for the energy distribution of species(N^+,N\-f) at the cathode; creation rate and density of atomic species(N^+,N) decreases with increasing temperature at steel surface, calculated results are generally in agreement with experimental ones.

关 键 词：金属表面氮化 氮直流辉光放电 蒙特卡罗模拟 氮化粒子 离解碰撞 粒子数密度 

分 类 号：O562.2[理学—原子与分子物理] O539[理学—物理]