微泵的结构与流体分析  

Analysis on the structure and hydrokinetics of micropump

作　　者：贾建援[1] 黄新波[1] 康春霞[1] 

机构地区：[1]西安电子科技大学机电工程学院,陕西西安710071

出　　处：《微纳电子技术》2004年第5期41-44,共4页Micronanoelectronic Technology

摘　　要：利用扩散阀/喷嘴的流体特性设计了一种无活动阀压电式微泵;应用小挠度弹性弯曲理论,导出圆形压电复合层薄板的弹性曲面微分方程和复合层薄板的中性面位置方程;应用压电理论导出压电薄膜的边缘电场分布;应用微流体力学理论导出微泵单次循环的净流量。结合华盛顿大学的压电式微泵模型理论算出其最大流量为958μl/min,与其试验结果相吻合。A new valve?鄄less piezoelectric micropump was designed on the flow?鄄direction properties of diffuser and nozzle elements. Some elastic curved surface differential equations and neutral planes of circular piezoelectric composite laminates are derived from the elastic thin plate bending theory with small deflection. The edge electric field distribution of piezoelectric laminates was gained by piezoelectricity. A total pumped volume during a pump cycle is calculated by micro?鄄hydrokinetics and a maximum pumped volume which is 958 μl/min combining a piezoelectric micropump model fabricated by Washington University agrees well with their experienced results.

关 键 词：微泵 结构 流体分析 扩散阀 微泵 压电效应 流量 

分 类 号：TH3[机械工程—机械制造及自动化]