高精度激光三角位移传感器的技术现状  

Present Status of High Precision Laser Displacement Sensor Based on Triangulation

作　　者：冯俊艳[1] 冯其波[1] 匡萃方[1] 

机构地区：[1]北京交通大学理学院,北京100044

出　　处：《应用光学》2004年第3期33-36,共4页Journal of Applied Optics

摘　　要：　三角测量法是一种传统的位移测量方法。随着激光器、光电探测器和计算机的发展,三角测量法有了很多新的进展和应用。对激光三角位移测量系统进行概述和讨论。根据光线的不同入射方式激光三角位移传感器主要分为两种:直入射式和斜入射式。分别介绍了这两种方法的测量原理,并对它们各自的特点进行了比较。最后阐述了高精度激光三角位移传感器的应用方向及发展趋势。Laser measurement based on triangulation is a traditional method for measuring displacement. Along with the development of Lasers, photoelectric detectors and computers, triangulation method has made much progress and found more and more applications. Several laser methods based on triangulation for measuring displacement are surveyed and discussed in this paper. Laser triangulation measurement techniques can be mainly divided into two types,the normal incidence and oblique incidence, based on the incidence way of the light.The measurement principles of these two kinds are introduced respectively and their characteristics are compared. Some application examples and the development trends of high precision laser displacement sensor based on triangulation are given at the end of this paper.

关 键 词：三角测量法 高精度激光位移传感器 光电探测器 非接触测量 

分 类 号：TN247-3[电子电信—物理电子学]