相位测量轮廓术中随机相移误差的校正算法  

Correction Algorithm of Random Phase Shifting Errors in Phase Measuring Profilometry

作　　者：王立无[1] 苏显渝[1] 周利兵[1] 

机构地区：[1]四川大学光电科学技术系,成都610064

出　　处：《光学学报》2004年第5期614-618,共5页Acta Optica Sinica

基　　金：国家自然科学基金 (6 0 1770 0 1;10 376 0 18)资助课题

摘　　要：在相位测量轮廓术 (PMP)中 ,随机相移误差是导致测量误差的重要因素 ,提出一种新的随机相移误差的校正算法 ,在五步相移的基础上不需要求解相位分布 ,通过近似处理可以直接求解相移过程中存在的随机相移误差 ,在保证精度的情况下 ,能大大减少迭代次数和计算量。推导了新算法的计算公式 ,详细说明了随机相移误差的求解过程。计算机模拟和实验证实了新的算法的有效性。与In bokKong的算法相比较 ,新算法能大大减少迭代次数和计算量。该新算法也同样适用于相移干涉计量。In phase-measuring profilometry (PMP), the random phase shifting errors is a important factor that leads to measuring errors. A new correction algorithm of random phase shifting errors is proposed on the basis of five-step. The new algorithm can directly solve random phase shifting errors without solving the phase by approximate treatment. It can greatly reduce the number of iteration and calculation with the intended accuracy. The formulas of the new algorithm is induced and the process to solve random phase shifting is indicated in detail. The validity of this algorithm has been demonstrated by means of compute simulation and experiment. It can greatly reduce the number of iteration and calculation in comparison with the algorithm of In-Bok Kong. The new algorithm can also apply in phase-shifting interferometry.

关 键 词：信息光学 相移算法 相位测量轮廓术 相位误差 相移误差 

分 类 号：O438.1[机械工程—光学工程]