注入N离子改性的Ti-2Al-2.5Zr合金表面性能研究  

Surface Modification of a Ti-2AI-2.5Zr Alloy by N Ion Implantation

作　　者：祖小涛[1] 封向东[2] 邓炯[2] 邱绍宇[3] 周继萌[2] 王治国[1] 

机构地区：[1]电子科技大学应用物理系,成都610054 [2]四川大学辐射物理及技术教育部重点实验室,成都610064 [3]中国核动力研究设计院核燃料及材料国家级重点实验室,成都610041

出　　处：《核动力工程》2004年第3期233-235,251,共4页Nuclear Power Engineering

摘　　要：往Ti-2Al-2.5Zr合金中注入能量为75 keV的N离子,注入剂量为3×1017/cm2和8×1017/cm2。75 keV N离子在Ti-2Al-2.5Zr合金的射程,借助TRIM 96程序计算的结果为1.2×10-7m。测试结果表明,Ti-2Al-2.5Zr合金的显微硬度随N离子注量的增加而升高,当注量为3×1017/cm2和8×1017/cm2时,Ti-2Al-2.5Zr合金的硬度分别升高260％和340％。注入后的样品用X射线衍射法及光电子能谱法进行分析。XRD衍射谱分析表明,Ti-2Al-2.5Zr合金有TiN新相生成。TiN相的生成被认为是Ti-2Al-2.5Zr合金显微硬度增加的主要原因。Implantation-enhanced hardening of a Ti-2Al-2.5Zr alloy by 75keV nitrogen ion implantation with the dose of 3×1017 N+ cm-2 and 8×1017 N+ cm-2 is investigated. The surface characterization of samples was studied by XRD and Vickers hardness tests. The nitrogen implantation increases the surface hardness up 340% and 260 for the dose of 8×1017 and 3×1017 N+ cm-2, respectively. The results of XRD analysis show that TiN is formed in the surface region. Nitrogen-ion-implantation-enhanced hardening is mainly due to the formation of TiN.

关 键 词：N离子注入 TI-2AL-2.5ZR合金 XRD 显微硬度 

分 类 号：TG174[金属学及工艺—金属表面处理]