一种抗灰尘的近场承载微工作台设计  

Design of a subminiature anti-particles load-supporting stage for near-field optical storage

作　　者：赵大鹏[1] 李庆祥[1] 李玉和[1] 訾艳阳[1] 王亮[1] 彭海成[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《光学精密工程》2004年第3期249-253,共5页Optics and Precision Engineering

基　　金：国家自然科学基金(50305012);高等学校博士点专项科研基金(20020003015)资助项目

摘　　要：为满足近场光存储的高密度、高速度和集成化的要求,提高近场界面耦合效率,消除灰尘对固体浸没透镜(SIL)的磨损,设计了一种新型的承载微工作台,并建立了系统动力学模型。微工作台正负压力并存的结构极大地提高了承载刚度及工作稳定性;气垫面的V形轨道设计及独特的负压力布局有效减少了流入SIL底面的灰尘颗粒;SIL底面刻饰的凸台有利于获得较高的近场耦合效率,同时减小了与盘面碰撞的概率。理论分析和计算表明,微工作台的近场间距小于50nm,承载力可达88mN,SIL底面灰尘颗粒明显减少,微工作台具有良好的工作姿态,满足了近场光存储的需要。In order to meet the requirements of the near-field optical storage system for higher density, higher communication speed and integration, a subminiature anti-particles load-supporting stage was designed for low wear and high near-field coupling efficiency. A model of air bearing surface was investigated and solved using the finite volume method for analysis of the flying characteristics. The abundant negative pressure sufficiently enhances the stiffness and stability of the stage. The wedge-shaped rails and the novel distribution of negative force efficiently reduce the particles. The rail etched on the SIL achieved ultra sub-micron displacement from the disk surface. The theoretical analysis and computation show that a near-field gap of less than 50 nm can be successfully obtained. The carrying capacity exceeds 88 mN. Few particles are retained under the SIL. The flying head is robust for the near-field optical system.

关 键 词：微工作台 气垫面 V形轨道 负压力 近场光存储 

分 类 号：TH703[机械工程—仪器科学与技术]