基于纳米沸石分子筛薄膜的新型气体传感器  

Novel gas sensor based on nano-zeolite

作　　者：黎坡[1] 谢海芬[1] 刘志城[2] 黄宜平[1] 赵东元[2] 

机构地区：[1]复旦大学微电子学系,上海200433 [2]复旦大学化学系,上海200433

出　　处：《传感器技术》2004年第5期77-80,共4页Journal of Transducer Technology

基　　金：国家自然科学基金资助项目(30170266)

摘　　要：研究了一种基于纳米沸石分子筛Ag+ZSM 5的新型气体传感器。该传感器利用纳米沸石分子筛Ag+ZSM 5对丙酮分子有较好的选择性和石英晶体振荡器对微小质量改变的高度灵敏性的特性设计并制作了对丙酮敏感的气体传感器。研究结果发现,采用ZSM 5型分子筛并用Ag+对该分子筛进行修饰可以提高对丙酮气体的响应,而对乙醇的响应较小。对不同浓度的丙酮气体的测试表明:在较低的丙酮气体浓度(0.67μmol/L)下,传感器表现出良好的响应,检测灵敏度较高,可达到44.8Hz/(μmol·L-1)。同时,该传感器具有良好的可逆性、重复性。A novel gas sensor based on nano-zeolite Ag^+ZSM-5 is studied. By combining the high selectivity of (Ag^+ZSM-5) to acetone and the high sensitivity of QCM to micro mass change, a acetone gas sensor is designed and fabricated. It is found that the selectivity of sensor to acetone is improved by using nano-zeolite Ag^+ZSM-5,and is small to ethanol gas. The measurement results for different concentration of acetone show the sensor has good response to acetone at low concentration ((0.67 μmol/L)) and high sensitivity of (44.8 Hz/(μmol·L^(-1))). The results also show the good reversibility and repeatability of the gas sensor.

关 键 词：气体传感器 石英晶体振荡器 纳米沸石分子筛 丙酮 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]