抛物柱面镜扫描系统设计  

Design of Parabolic Mirror Scanning System

作　　者：刘栋玉[1] 罗志勇[1] 汪伟峰[1] 

机构地区：[1]华中理工大学,武汉430074

出　　处：《半导体光电》1993年第1期67-71,共5页Semiconductor Optoelectronics

摘　　要：本系统用于大尺寸物体(如冷轧钢板)表面缺陷的在线检测。表面检测质量的主要因素是光学系统的设计方案。选用抛物柱面镜装置的特点是检测线上所有的点构成匀速恒定的检测状态。而对大尺寸物体表面缺陷的在线检测,F·θ型式扫描系统是不能满足扫描要求的。Parabolic mirror scanning system is used for on-line detection of surface defect in large size materials(e.g.cold-rolled steel plate).The quality of surface detection,mainly depends on the design method.The parabolic reflector is characterized by that each point in the detection line is in uniform and cons- tant detection state.However F.θ scanning system cannot meet the needs for on- line detection of surface defect in large size materials.

关 键 词：抛物柱面镜 表面缺陷 在线检测 

分 类 号：TN247[电子电信—物理电子学]