基于FPGA的太阳能真空集热管磁控溅射镀膜机控制系统的设计  

Design of SCS Control System Based on FPGA

作　　者：王彦[1] 冯政权[1] 

机构地区：[1]南华大学电气工程学院,湖南衡阳421001

出　　处：《真空电子技术》2004年第2期48-51,共4页Vacuum Electronics

摘　　要：介绍了基于FPGA的太阳能真空集热管磁控溅射镀膜机控制系统的整体设计和工程实现过程。该设计以可编程逻辑器件为核心控制部件,它由工序控制流程模块、参数设置及调用模块和通讯模块三个模块组成;并基于超高速硬件描述语言在Xilinx公司SpartanⅡ系列的XC2S2005PQ-208芯片上编程实现;结合先进的人机界面触摸屏,直观地监控整个工艺过程,实现对太阳能真空集热管磁控溅射镀膜机较理想的控制。This paper introduces an integrated design and implementation of the SCS control system based on FPGA. The programmable logic device of FPGA is a core controller unit of the design and it is composed of three modules: the process control course module, parameters setting and calling module and communication module. The design can be achieved in the XC2S2005PQ-208 chip of Xilinx corporation by programming with the VHDL(very high-speed description language). With advanced man and machine interactive windows-HMI, we can use this SCS control system to supervise the entire technological process and achieve a perfect control to the SCS.

关 键 词：可编程逻辑器件 超高速硬件描述语言 人机界面触摸屏 太阳能真空集热管磁控溅射镀膜机 

分 类 号：TP332.3[自动化与计算机技术—计算机系统结构]