基于CdS薄膜的柔性光探测器研究  

CdS Film-Based Flexible Photodetectors

作　　者：陈红蕾 盛俊华 彭锐 叶传瑶 王敏 

机构地区：[1]合肥工业大学,材料科学与工程学院,安徽合肥

出　　处：《应用物理》2019年第8期373-378,共6页Applied Physics

基　　金：国家自然科学基金面上项目(21473047)。

摘　　要：本文采用电子束蒸发镀膜法在PET柔性衬底上制备出基于CdS薄膜的柔性光探测器。PET对高温有敏感性,利用电子束蒸发镀膜方法可以在低温下制备出CdS薄膜。运用XRD、拉曼光谱和AFM对PET上CdS薄膜进行表征,结果表明所制备的薄膜致密性好、性能优异。批量制备器件,在偏压为1 V,光功率为365 nm的紫外光源照射条件下进行光响应性能测试,获得的光电流为0.347 μA,响应度达到17.35 A/W。对器件在不同弯曲应变下进行测试。统计测试数据显示CdS薄膜柔性光探测器件在0.08%~0.12%应变下,弯曲前后光电流变化较小,表明CdS薄膜柔性光探测器在应变为~0.1%下性能稳定。CdS film-based flexiblephotodetectors were fabricated by depositing CdS films on flexible PETsubstrate in combination with evaporating the Au/Cr electrodes using the shadowmask.PET is sensitive to high temperature and films can be deposited at lowtemperature by e-beam evaporation method.The as-produced CdS films were characterized by XRD,Raman and AFM,and the results show that thepreparation of CdS films with good compactness has been succeeded on PET by e-beam evaporation method.The photoresponseproperties were tested under the irradiation of a 365 nm ultraviolet light withpower of 1 mW/cm2 under a biasvoltage of 1 V.The obtained photocurrent and calculated responsivity are 0.347μA and 17.35 A/W,respectively.Finally,the devices were tested under bendingwith different strains for 1 h.The statistics results show that the photocurrentsof the CdS film-based flexible photodetectors have little to no change beforeand after bending under the strain of 0.08%to 0.12%,indicating that thedevices have stable performance under the strain of^0.1%.

关 键 词：电子束蒸镀 PET衬底 CDS薄膜 柔性光探测器 光电流 

分 类 号：O48[理学—固体物理]