ZnO/多孔硅复合薄膜的光学性能  

Optical Properties of ZnO/Ps Composity Films

作　　者：倪惟一 端木庆铎[1] 

机构地区：[1]长春理工大学理学院,吉林 长春

出　　处：《应用物理》2020年第1期1-7,共7页Applied Physics

摘　　要：采用金属辅助化学刻蚀(MACE)法制备不同的多孔硅衬底,溶胶–凝胶法以醋酸锌(Zn(CH3COO)2?2H2O)、无水乙醇作为前驱液制备ZnO/多孔硅复合薄膜。借助扫描电子显微镜(SEM)、X射线衍射(XRD)、光致发光谱(PL)等手段,对ZnO/多孔硅复合薄膜的表面形貌、晶格结构、光学性能进行表征及分析,研究了不同衬底对ZnO/多孔硅复合薄膜形貌、结构及光学性能影响。研究结果表明刻蚀时间为20 min的复合薄膜结晶性更好,在可见光波段有很强的光致发光带,呈现白光发射。Using metal auxiliary chemical etching (MACE) of different porous silicon substrate, prepared by the sol-gel method with zinc acetate (Zn(CH3COO)2?2H2O) liquid anhydrous ethanol as precursor preparation of ZnO/porous silicon composite membrane by means of scanning electron microscope (SEM), X-ray diffraction (XRD) to hair spectroscopy (PL), and other means, on the surface morphology of ZnO/porous silicon composite film lattice structure, optical properties were char-acterized and analyzed to study the different substrate of ZnO/porous silicon composite membrane morphology structure and optical properties. The results showed that the composite film with etching time of 20 min had better crystallinity, and had a strong photoluminescence band in the visible band, presenting white light emission.

关 键 词：金属辅助化学刻蚀 溶胶–凝胶 光学性能 

分 类 号：TB3[一般工业技术—材料科学与工程]