非匀质渐变折射率增透膜的制备方法  

Preparation Method of Non-Uniform Gradient Refractive Index Antireflective Films

作　　者：杨隽锋 麦淳铭 曾丽娜 李再金 陈浩 刘国军 李林 乔忠良 曲轶 钟婷婷 疏轶超 徐东昕 李联合 

机构地区：[1]海南师范大学物理与电子工程学院,海南 海口 [2]海南师范大学海南省激光技术与光电功能材料重点实验室,海南 海口 [3]海南师范大学半导体激光海南省国际联合研究中心,海南 海口

出　　处：《应用物理》2023年第11期465-475,共11页Applied Physics

摘　　要：增透膜是指具有降低表面反射率、增加透过率特性的光学薄膜。随着太阳能源、光学观测、新型光学系统等应用领域的发展,对具有宽角度增透特性的薄膜的需求越来越迫切,已经成为国内外光学领域的研究热点。本文介绍了非匀质渐变折射率增透膜倾斜沉积、干法刻蚀、湿法刻蚀制备方法和性能的最新进展,并进行了分析与评价。讨论了非匀质渐变折射率增透膜的制备在研究中面临的挑战与可行的研究方向。The antireflective film refers to an optical thin film with the characteristics of reducing surface reflectivity and increasing transmittance. With the development of application fields such as solar energy, optical observation, and new optical systems, the demand for thin films with wide-angle antireflection properties is becoming increasingly urgent and has become a research hotspot in the optical field at home and abroad. This article introduces the latest progress in the preparation methods and properties of non-uniform gradient refractive index antireflective films by inclined deposition, dry etching, and wet etching, and analyzes and evaluates them. The challenges and feasible research directions faced in the preparation of non-uniform gradient refractive index antireflective films were discussed.

关 键 词：非匀质薄膜 渐变折射率 增透膜 

分 类 号：O48[理学—固体物理]