阳极氧化制备TiO₂多孔薄膜及其气敏传感特性研究  

Preparation of TiO2Porous Film by Anodic Oxidation and Its Gas Sensing Properties

作　　者：许永康 罗锦鹏 时吉进 杨为家 陈梅 

机构地区：[1]五邑大学应用物理与材料学院,广东 江门 [2]江门市柔性电极材料及其应用工程技术研究中心,广东 江门

出　　处：《应用物理》2024年第11期713-720,共8页Applied Physics

摘　　要：二氧化钛(TiO2)是一种气敏传感材料,受到比表面积小的影响,TiO2薄膜型气敏传感器的性能普遍不理想。本研究采用阳极氧化制备了TiO2多孔薄膜,以改善其气敏传感特性。SEM观察发现工作电压是影响TiO2多孔薄膜形貌的关键因素:在醇溶液体系中,45~60 V是制备TiO2多孔薄膜的理想工作电压。研究还发现,0.05 mm的Ti片更有利于获得大孔径的TiO2多孔薄膜。XRD和Raman光谱都证实所制备的样品是TiO2多孔薄膜,同时Raman光谱也确认了Pt修饰能够显著增强其光谱性能。气敏传感特性表明Pt修饰后TiO2多孔薄膜具有更加优异的气敏传感性能。Titanium dioxide (TiO2) is a kind of gas sensing material, which is affected by the small specific surface area. The performance of TiO2 thin film gas sensor is generally not ideal. In this study, TiO2 porous films were prepared by anodic oxidation to improve its gas sensing properties. SEM observation shows that the working voltage is the key factor affecting the morphology of TiO2 porous films. In the alcohol solution system, 45~60 V is the ideal working voltage for the preparation of TiO2 porous films. It is also found that 0.05 mm thick Ti sheet is more conducive to obtain large pore size TiO2 porous film. Both XRD and Raman spectra confirmed that the prepared samples were TiO2 porous films, and it was also confirmed that Pt modification could significantly enhance their spectral properties. The gas sensing properties show that the Pt modified TiO2 porous film has more excellent gas sensing properties.

关 键 词：阳极氧化 TiO₂ 多孔薄膜 气敏传感 

分 类 号：TB3[一般工业技术—材料科学与工程]