石墨烯膜微流量敏感元件温度影响分析  

Temperature Effect Analysis of Graphene Membrane Microflow Sensor

作　　者：王清杨 李子涵 史慧超 

机构地区：[1]北京化工大学信息科学与技术学院,北京

出　　处：《仪器与设备》2024年第2期239-245,共7页Instrumentation and Equipments

摘　　要：差压式流量测量技术在精密化工、生物医学、流程工业等领域具有重要应用。本文以石墨烯膜差压式微流量传感器的敏感元件作为研究对象,探讨了温度变化对其流量测量结果的影响,并建立了温度敏感元件的有限元分析仿真模型,从流体的粘度和密度两个因素,对温度影响导致的流量变化趋势进行了分析总结,为探索和改进石墨烯膜差压式微流量传感器在不同温度条件下的性能提供参考。Differential pressure flow measurement technology has important applications in precision engineering, biomedica, process industry and other fields. In this paper, the sensitive element of graphene membrane differential pressure microflow sensor is taken as the research object, the influence of temperature change on its flow measurement results is discussed, and the finite element analysis simulation model of temperature sensitive element is established. The flow variation trend caused by temperature is analyzed and summarized from the two factors of viscosity and density of the fluid to provide a reference for exploring and improving the performance of graphene membrane differential pressure microflow sensor under different temperature conditions.

关 键 词：流量测量 温度分析 ANSYS仿真 

分 类 号：TP2[自动化与计算机技术—检测技术与自动化装置]