基于微型传感器的近场辐射传热实验方法研究  

Studying on the Experimental Method of Near-Field Thermal Radiation Based on Micro Sensors

作　　者：冯冲 张俊星 施展 唐祯安 余隽 

机构地区：[1]大连民族大学信息与通信工程学院,辽宁大连 [2]大连理工大学电子信息与电气工程学部,辽宁省集成电路重点实验室,辽宁大连

出　　处：《传感器技术与应用》2018年第1期21-30,共10页Journal of Sensor Technology and Application

基　　金：国家自然科学基金重大项目(60806038);国家自然科学基金项目(61131004);国家自然科学基金项目(61503058);大连民族大学博士启动基金(110074);大连民族大学自主基金项目(DC201501057)。

摘　　要：面向二氧化硅(SiO2)材料开展了近场辐射传热实验测量方法研究,其核心工作是近场热辐射传感器设计。首先,基于电磁波理论以两个平行的SiO2平板为对象分析近场热辐射的特性并以此确定近场热辐射传感器的关键参数;其次,根据近场热辐射的作用效果确定实验方案并设计相应的近场热辐射传感器;再次,基于经典传热理论确定实验模型,以及设计传感器的微加工工艺;最后,本实验方法在其他介质的近场辐射传热测量中的应用。The experimental method of near-field thermal radiation between two Silicon oxide (SiO2) plates was developed. The key work is the near-field thermal radiation (NFTR) sensor design. Firstly, the character of the near field thermal radiation between two parallel SiO2 plates was analyzed based on the electromagnetic wave theory, and the key parameter of the NFTR sensor was chosen. Se-condly, according to the difference effect of the thermal radiation emitter and the thermal radiation absorber, two kinds of experimental plan were made and the NFTR sensor was designed, separately. Thirdly, the experimental model was built by the classical heat transfer theory and the micromachining process of the NFTR sensor was developed. Finally, the experimental method was extended to evaluate the near-field thermal radiation between other medium.

关 键 词：微型传感器 二氧化硅 悬空薄膜 近场热辐射 

分 类 号：TP2[自动化与计算机技术—检测技术与自动化装置]